Aliouchouche, A: search on Z-Library

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1

Pulsed laser etching of silicon: Dopant profile modification and dopant desorption induced by surface melting

A. Desmur, B. Bourguignon, J. Boulmer, J. Ozenne, J. Budin, D. Débarre, A. Aliouchouche

Year:

1994

Language:

english

File:

PDF, 1.05 MB

english, 1994

2

Modification of Foreign Atom Concentrations and Profiles in Silicon and Si1-x-y GexCy Alloys by Laser Chemical Etching

Boulmer, J., Desmur, A., Bourguignon, B., Ozenne, J.-B., Laval, R., Aliouchouche, A., Débarre, D., Budin, J.-P.

Journal:

Materials Science Forum

Year:

1995

File:

PDF, 441 KB

1995

3

Sustaining power per electron for a large low-pressure argon magnetoplasma reactor: experiment and isothermal model results

Margot, J, Vidal, F, Chaker, M, Johnston, T W, Aliouchouche, A, Tabbal, M, Delprat, S, Pauna, O, Benhabib, D

Journal:

Plasma Sources Science and Technology

Year:

2001

Language:

english

File:

PDF, 152 KB

english, 2001

4

Laser etching of silicon: Dopant desorption, diffusion and segregation during laser induced surface melting

A. Desmur, J.-B. Ozenne, B. Bourguignon, J. Boulmer, J.-P. Budin, D. Débarre, A. Aliouchouche

Journal:

Surface and Interface Analysis

Year:

1994

Language:

english

File:

PDF, 383 KB

english, 1994

5

The role of gas-phase in the laser etching of Cu by CCl4

D. Débarre, A. Aliouchouche, J. Boulmer, B. Bourguignon, J.P. Budin

Journal:

Applied Surface Science

Year:

1996

Language:

english

File:

PDF, 327 KB

english, 1996

6

Laser etching of silicon by chlorine: effect of post-desorption collisions and chlorine in-diffusion on the laser desorption yield

A. Aliouchouche, J. Boulmer, B. Bourguignon, J.-P. Budin, D. Débarre, A. Desmur

Journal:

Applied Surface Science

Year:

1993

Language:

english

File:

PDF, 635 KB

english, 1993

7

Laser modifications of Si(100) : Cl surfaces induced by surface melting: etching and cleaning

B. Bourguignon, M. Stoica, B. Dragnea, S. Carrez, J. Boulmer, J.-P. Budin, D. Débarre, A. Aliouchouche

Journal:

Surface Science

Year:

1995

Language:

english

File:

PDF, 1.68 MB

english, 1995

8

SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA (Wednesday 1 February 1995)] Laser-Induced Thin Film Processing - Laser chemical etching of copper films

Aliouchouche, A., Boulmer, Jacques, Debarre, D., Bourguignon, B., Budin, Jean-Pierre, Dubowski, Jan J.

Year:

1995

Language:

english

File:

PDF, 1.09 MB

english, 1995

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